Novitec

We will participate in Photonix 2021 in Japan

admin 2021-09-30 12:16:51 View 2,821

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Novitec provides the best measurement solutions of high precision of several nanometers and high-speed of tens of kilohertz

in the latest semiconductor and display manufacturing process with world-class optical metrology systems.

Exhibit items :

1. t-Nova-P + s-Nova-850

t-Nova-P is and all-fiber type sensor based on spectral domain interferometry. t-Nova-P combined with s-Nova-850 provides the world's highest measurement speed of 130 kHz.

The combined system can be used in a very flexible structure without spatial constraints at processes requiring real-time monitoring with high precision of several nanometers.

2. t-Nova-SDI + s-Nova-1525

t-Nova-SDI is an optical sensor measuring thickness and refractive index simultaneously. t-Nova combined with s-Nova-1525, and ultra-fast smart spectrometer,

provides the world's highest measurement speed of 30 kHz. s-Nova-1525 itself processes the spectral signal at high speed and calculates thickness and refractive index information.

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